6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices

As taught in: Spring 2007

Prototype design of a microsystem cooler.

An illustration of the prototype design of a microsystem cooler that is being fabricated at the NASA Glenn Research Center. The microsystem cooler is suited mostly to volume-limited applications that require cooling below the ambient or sink temperature. (Image courtesy of NASA Glenn Research Center.)

Level:

Graduate

Instructors:

Prof. Carol Livermore

Prof. Joel Voldman

Course Features

Course Description

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Technical Requirements

Special software is required to use some of the files in this course: .m.