Archived Versions

6.152J / 3.155J Micro/Nano Processing Technology

As taught in: Fall 2005

Photo showing a pad structure with a penny on top.

A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)




Prof. Martin Schmidt

Susan Ruff

Dr. Robert O’Handley

Course Features

Course Description

This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.

*Some translations represent previous versions of courses.